Industriella tillämpningar


High performance, high flow 250 slm mass flow controllers
The P250A is a metal-sealed, multi-gas/multi-range mass flow controller capable of ranges from 100 to 250 slm Nitrogen Full Scale flow with a unique control valve design for rapid set point response while maintaining closed conductance leak rates well below other high flow MFCs.

The P250A, with fast settling time (less than 2 seconds) and 1% of set point accuracy outperforms other typical high flow MFCs.

Key features

  • Flow rates from 100 to 250 slm
  • Multi-gas/multi-range with 1% of set point accuracy
  • Analog I/O: 0 to 5 VDC, 4 to 20 mA
  • Digital I/O: DeviceNet, RS485, Profibus

Short Process Steps Performance

The P250A’s performance capabilities of fast settling time (less than 2 seconds) and one (1) percent of set point accuracy exceed those of other typical high flow MFCs. Control capability extends down to 2% of the device’s configured Full Scale. These capabilities combined with the devices multi-gas/multi-range capability extend the users ability to minimize required high flow MFC inventory for MOCVD, silicon epitaxy, RTP and diffusion/ oxidation applications.

Multi-Gas / Multi-Range Capability

Utilization of the multi-gas/multi-range capability is made simple through the device’s embedded software and standard Ethernet interface that requires no special software or hardware to operate, only a standard web browser and a PC. Already stored on the device are critical gas parameters for typical high flow rate gases in use. It’s simply a matter of selecting the gas and specifying the Full Scale flow range to configure the device. This interface also allows the user to perform device diagnostics, plot flow and store data for offline analysis.

P Series Mass Flow Controller Overview

P-Series high performance MFCs feature full digital control architecture for fast response to setpoint over the operable device range. The embedded web browser application allows changes in gas type and full scale flow, which reduces overall costs by minimizing the number and variety of MFCs that must be kept in inventory.