Fitted with three sputtering heads to ensure even deposition of individual large specimens up to 8″/200mm or multiple specimens over a similar diameter. Ideal for thin-film applications and SEM/FE-SEM.

Key features

• Ultimate vacuum of 1 x 10-6 mbar or less possible
• New touch and swipe capacitive screen
• USB port for upgrades and download of process log files
• Multiple-use profiles can be set up on one machine
• New software sorts recipes per user according to recent use
• 16GB of memory can store more than 1000 recipes
• New multi-colour LED visual status indicator
• Interchangeable stage options
• Three sputter heads for larger area deposition of different materials

Recommended applications

• Wafer Inspection
• Multiple sample preparation for SEM