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Multi-gas, multirange, elastomer sealed MFC for
flow rates up to 300 slm
GE250A & GE300A mass flow controllers are general purpose, elastomer-sealed MFCs suited for a wide variety of applications.

The GE250A can be ranged from 100 to 250 slm (N2 equivalent). The GE300A can be ranged from 150 to 300 slm (N2 equivalent). Both are available with either analog I/O or digital I/O utilizing the latest control algorithms for fast and repeatable response to set point.

Settling times of 1 to 2 seconds and set point accuracies below 1% of setpoint exceeds typical high flow mass flow controllers. Precise control is maintained down to 2% of the configured Full Scale flow range. Multi-gas/multi-range capability and tight performance specifications for accuracy, control range, and transient response minimize flow controller inventory requirements.

The multi-gas/multi-range feature and other custom controls are accessed through the embedded diagnostic interface. A standard Ethernet cable and JAVA-enabled HTML browser are the only tools needed. Critical gas parameters for typical high flow rate gases are already stored on the MFC. Configure an G-Series mass flow controller by selecting the gas from a drop-down menu and specify the desired Full Scale flow range. Perform routine device health checks, plot flow response, and store operating data for offline analysis with the G-Series MFC diagnostic interface.

Key features

  • Fast response to set point change reduces flow stabilization time
  • Tight flow accuracy improves process matching
  • Reduced inlet pressure (pressure drop) requirement simplifies gas supply regulation
  • Multi-Gas/Multi-range reduced MFC inventory
  • Configuration/diagnostics via Ethernet & web browser – no special software needed