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High performance multi-gas, multirange
5 to 50,000 sccm mass flow controllers
The P4B is the next generation of multi-gas/multi-range mass flow controllers designed to meet critical gas flow control requirements for accuracy and speed of response while minimizing mass flow controller inventory requirements.

P4B MFC multi-gas/multi-range capabilities are enabled with gas parameters already stored in memory which provide 1% of set point accuracy for the user selected gas and is capable of Full Scale ranges from 5 sccm to 50 slm.

Key features

  • Flow rates from 5 to 50,000 sccm
  • Multi-gas/multi-range with 1% of set point accuracy
  • Analog I/O: 0 to 5 VDC
  • Digital I/O: DeviceNet, RS485
  • MFM option

Short Process Steps Performance

The performance capabilities of the P4B are quickly apparent where short process steps are required given the sub 750 millisecond control times and accuracy to within 1% of set point. This performance extends over the range of process gases, whether “light” gases such as helium or “heavy” gases like SF6.

Multi-Gas / Multi-Range Capability

Utilization of the multi-gas/multi-range capability is made simple through the device’s embedded software and standard Ethernet interface that requires no special software, only a standard web browser and a PC. Already stored on the device are critical gas parameters for most of the gases in use today by the semiconductor industry. It is a simple matter of selecting the gas and specifying the range to configure the device. Through this interface the user can also perform device monitoring diagnostics while the device is P Series Mass Flow Controller Overview

P-Series high performance MFCs feature full digital control architecture for fast response to setpoint over the operable device range. The embedded web browser application allows changes in gas type and full scale flow, which reduces overall costs by minimizing the number and variety of MFCs that must be kept in inventory.