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Multi-gas, multirange, metal sealed MFC for
flow rates up to 50 slm
The GM50A digitally-controlled mass flow controller is available with either analog (0 to 5 VDC or 4 to 20 mA) or RS485, Profibus, EtherCAT®, or DeviceNet I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. I/O protocols are designed to allow the GM50A to easily replace RS485, Profibus and DeviceNet versions on earlier generations of MKS as well as many other suppliers MFCs.
A standard 3-inch footprint enables its use without modifying existing gas line configurations. The GM50A/GM51A mass flow controller has an electropolished surface finish (the GM50A mass flow meter is not electropolished).

Key features

  • Patented thermal sensor design for exceptional zero stability
  • Percent of set point accuracy enables precise process control
  • Embedded user interface – easily change device range & user gas, monitor & measure performance

Recommmended applications

GM50A/GM51A are general purpose MFCs designed for a wide variety of applications requiring flow control capability from 10 sccm to 50 slm Full Scale, N2 equivalent, and is also suitable for high purity processes.