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High performance pressure-insensitive,
multi-gas, multirange 5 sccm to 50 slm mass flow controllers
The P9B pressure-insensitive, multi-gas/multi-range mass flow controller features sub-750 millisecond control times and accuracy to within 1% of set point over a broad range of process gases, from “light” gases such as helium to “heavy” gases like SF6.

P9B is a true multi-range/multi-gas MFC, capable of 5 sccm to 50 slm Full Scale flow rates, minimizing MFC inventory requirements.

Key features

  • Flow rates from 5 to 50,000 sccm
  • Pressure insensitive with integral pressure sensor
  • Multi-gas/multi-range with 1% of set point accuracy
  • Analog I/O: 0 to 5 VDC
  • Digital I/O: DeviceNet, RS485

Short Process Steps Performance

The performance capabilities of the P9B are quickly apparent where short process steps are required given the sub 750 millisecond control times and accuracy to within 1% of set point. This performance extends over the range of process gases, whether “light” gases such as helium or “heavy” gases like SF6. The P9B is a true multi-range/multi-gas MFC that enables the user to have confidence in this device’s capability and minimize MFC inventory requirements.

Multi-Gas / Multi-Range Capability

Utilization of the multi-gas/multi-range capability is made simple through the device’s embedded software and standard Ethernet interface that requires no special software, only a standard web browser and a PC. Already stored on the device are critical gas parameters for most of the gases in use today by the semiconductor industry. It is a simple matter of selecting the gas and specifying the range to configure the device. Through this interface the user can also perform device monitoring diagnostics while the device is operating.

P Series Mass Flow Controller Overview

P-Series high performance MFCs feature full digital control architecture for fast response to setpoint over the operable device range. The embedded web browser application allows changes in gas type and full scale flow, which reduces overall costs by minimizing the number and variety of MFCs that must be kept in inventory.