Kapacitansmanometrar Absolut Tryck

DA05A 0.1-1.0 Torr Heated Baratron® Capacitance Manometer with EtherCAT®

The DA05A Baratron® Capacitance Manometer is the next generation EtherCAT® manometer from MKS, the industry leader in capacitance manometer pressure gauges.

The DA05A builds off the same Inconel® sensor as the industry and process proven MKS 600 Series and DA02A/ DA02B Baratron Capacitance Manometer, resulting in long life, low maintenance, exceptional corrosion resistance, and high maximum overpressure limit. The manometer is equipped with a 1 ms EtherCAT® communication refresh rate, 12 ms nominal pressure response time, automotive grade electronics, and an extended maximum ambient operating temperature of 60°C. The advanced electronics in the DA05A also provides an improved signal to noise ratio and faster response time than the industry-standard DA02A/ DA02B. Further, the resolution and response of both the analog and digital pressure signal can be user optimized for the specific application through adjustment of the programmable filter setting.

Available with the standard MKS sensor or optional proprietary etch/fluorine/deposition friendly sensor for enhanced stability and reduced process induced zero drift in critical etch or deposition applications.


  • Improved signal to noise over the industry standard DA02A/DA02B allows better response time versus noise optimization
  • Inconel-based sensor offers superior corrosion resistance enabling longer lifetime under extreme process conditions
  • High maximum overpressure limit of 45 PSIA, protects the sensor from permanent damage from high pressure excursions
  • Excellent long-term stability reduces maintenance needs
  • Optional etch/fluorine/deposition friendly sensor minimizes process byproduct induced zero drift

Baratron Capacitance Manometer Technology
Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.

Percent of Reading Accuracy
Accuracy is specified as a percent of Reading, not Full Scale, as seen in some of the lower performance devices. Percent of Reading accuracy provides you with an even more accurate output signal in the lower scale of the pressure range, where it is needed most.

Internally Heated to 100°C
These capacitance manometers are temperature controlled to 100°C for improved accuracy. Unheated versions are exposed to ambient temperature variations which can degrade the sensor accuracy. These devices have the sensor enclosed in a volume that is maintained at a constant temperature above ambient. This solution improves the manometer’s accuracy and repeatability and lowers instrument drift by reducing or eliminating process contamination within the manometer. Heated manometers are recommended for applications that require maximum accuracy and repeatability, operate above ambient temperature and for those processes that employ hot gases.

Absolute Pressure Measurement
These Baratron® pressure transducers are referenced to vacuum for absolute pressure measurement. Applications include: vacuum furnaces, freeze-drying of fruits and vegetables, gas lasers, automotive component testing, bottle coatings, and vacuum distillation.

All-Inconel® Wetted Surfaces
These pressure transducers feature all Inconel® construction of the pressure sensor allowing it to operate without damage in virtually any chemical environment, including exposure to halogens, deionized water and steam, and ozone.

0 to 10 VDC Proportional Analog Output
These Baratron capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements.

Recommended for Etch Processes
MKS has implemented solutions within the manometer’s pressure sensing element to minimize the effects of process byproducts and process gases. For processes that generate large quantities of condensable byproducts, MKS recommends the etch baffle sensor that significantly reduces the ability of byproducts to reach the sensor, minimizing process-induced zero drift. For very low pressure processes where fluorine burn-in is the main issue, MKS recommends the fluorine friendly (FF) sensor offering the ultimate in short- and long-term stability in fluorine chemistry.