FDG 15

Hot filament ion source
The FDG 15 ion source is designed to clean samples for surface analysis, to perform simple depth profiling, to act as an excitation source for ISS/LEIS experiments and optionally to provide slow ions (< 15 eV) e.g. for charge neutralization in ESCA.


An extremely clean ion beam is ensured by a non line-of-sight filament, a gas inlet directly into the ionization cage and an effective differential pumping. The ionization is done by electron bombardment to allow for a continuous variable beam current from the nA to μA regime. A dedicated ion focusing optics allows to reduce the spot size down to 300 μm for sputtering of small crystals and to adapt for large working distances up to 300 mm.

The power supply can be fully controlled by the front panel or via a TCP/IP interface. An ease of use LabVIEW™ – based PC software is provided.

Key features

  • True differential pumping
  • Non line-of-sight filament
  • Integrated port aligner
  • Up to 300 mm working distance
  • Variable spot size
  • Integrated port aligner
  • Ion current measurement


The source and the power supply can be upgraded with a regulated gas inlet in combination with a closed loop regulation for long time stabilization of the ion current. Another upgrade option is the low energy mode that generates < 15 eV ions e.g. for charge neutralisation in ESCA.

For dedicated depth profiling, the FDG 150 is available.