Model EV-M Dry Vacuum Pumps

For harsh processes
EBARA is launching a new vacuum pump design for harsh processes. The pumps have smaller dimensions and a 50% lower power consumption than the EST series. EV-M series have generally a higher H2 pumping speed compared to screw type vacuum pumps.

Key features

  • Lowest power consumption: Decreased user’s Cost of Ownership and reduced company’s carbon emissions
  • Smaller weight and dimensions compared to earlier models: User friendly
  • Higher H2 pumping speed compared to screw type vacuum pumps
  • Flexible rotation speed and idle mode as standard: Further power saving

Technical characteristics

  • Multi-stage lobe design engineered for harsh application
  • Enhanced by-procuct capability
  • Enhanced reliability through high torque motors
  • Main pump and booster pump with energy saving DC motors
  • Intelligent control system
  • Low noise and low vibration
  • Adjustable pumping speed by RPM variation
  • Very small footprint
  • Low consumption of electrical power, cooling water and nitrogen
  • Idle mode for additional energy savings