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Digitally-controlled mass flow controller
The GE50A is available with either RS485, Profibus™, EtherCAT®, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. I/O protocols are designed to allow the GE50A to easily replace RS485 and DeviceNet versions of the MKS 1179A MFC with minor coding.

A standard 3-inch footprint enables its use without modifying existing gas line configurations. The GE50A incorporates few elastomers – only one external elastomer seal and elastomer valve plug. All wetted surfaces are metal. The GE50A comes standard with Viton® seals or optional Buna, Neoprene® or Kalrez® to support different gas requirements.


GE50A is a general purpose MFC suited for a wide variety of applications requiring flow control capability from 10 sccm to 50 slm Full Scale, N2 equivalent.


  • Patented thermal sensor design for exceptional zero stability
  • Percent of set point accuracy enables precise process control
  • Embedded user interface – easily change device range & user gas, monitor & measure performance