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CDG-500 Capacitance Diaphragm Gauge

The Agilent CDG-500 series of temperature compensated capacitance diaphragm gauges provides the highest level of accuracy in the high-pressure region. Full-scale measurement ranges are available from 1000 to 1 Torr (1333 to 1.3 mbar).

The CDG-500 series uses a corrosion resistant ultra pure alumina ceramic diaphragm providing exceptional signal stability, fast recovery from atmosphere, short warmup times, and unparalleled robustness.

Used in a variety of applications such as thin film and vacuum processes, industrial vacuum processes, data storage, and semiconductor production processes.



  • Full scale ranges from 1 to 1000 Torr (1.3 to 1333 mbar) with pushbutton zeroing and optional setpoint control providing ease of integration
  • Excellent long-term signal stability and repeatability
  • Fast recovery from atmospheric pressures and rapid stabilization after start-up reduces process cycle times
  • Application robustness is achieved through a corrosion resistant ceramic sensor with sensor-shielding protection
  • Highest level of accuracy (0.2% of reading)




Single channel active gauge display and control unit